MENLO PARK, Calif. — In-line metrology supplier Boxer Cross Inc. today said it has moved to a new facility here with double the square footage and two-and-a-half times the manufacturing cleanroom and ...

Therma-Wave Inc. today said it has filed a patent infringement suit against Boxer Cross Inc. Therma-Wave alleges that Boxer-Cross’ BX-10 product infringes patents related to ion implant monitoring.