产先进芯片必不可少的EUV成为了全球关注的目标。 据semiwiki日前的报道，截至 2022 年第一季度，ASML 已出货 136 个 EUV 系统，约曝光7000 万个晶圆已曝光（如下图）。台积电在早前的技术大会上则表示，在全球已经安装的EUV光刻机系统中，台积电拥有了其中的 55%。三星的实际控制人李在镕日前则拜访了荷兰总统，以寻找更多的EUV供应。 这再次说明，生产先进芯片必不可少的EUV ...

After many years of hearing that EUV is almost ready for prime time, the tide is finally coming in. A decade of slow but steady progress has resulted in exposure tools that can expose on the order of ...

May 22, 2014. KLA-Tencor has announced the Teron SL650, a new reticle quality-control solution for IC fabs that supports 20-nm design nodes and beyond. With 193-nm illumination and multiple STARlight ...

Taiwan-based EUV pod and reticle box supplier Gudeng Precision Industrial reportedly has stopped shipments to Chinese clients, sparking market speculation that it might withdraw from the China market.